MEMS Based Vibration Meter

The ability to monitor vibrations in machinery or components has been recognized as a way to prevent premature or catastrophic failures. In FY06 vibration amplitude meter was constructed using breadboarded off-the-shelf components. An enhanced cantilever component was fabricated using unique methods of metal coating to increase sensitivity to vibration. The voltage-to-frequency board has performed as designed with the enhanced/metal coated cantilever beam accelerometer board. With the developmental effort approaching the completion phase, we identified a complete set of performance specifications for the sensor in cooperation with a vibrations sensor manufacturer and compressor manufacturer.

In FY07 a single-chip vibration amplitude meter will be constructed. Tests with a working compressor will validate the mounting technique and robustness of the single chip. In its simplest form, the vibration meter will act as a digital output vibration switch which produces a “GO / NO-GO” signal after experiencing a predetermined level of vibration, thus preventing further operation of the system until the vibrating component can be repaired. A final report will document the development of the vibration amplitude sensor.

Vance Payne
HVAC&R Equipment Performance Group
(301) 975-6663
vance.payne@nist.gov