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MEMS Sensors for HVAC&R: Small, Fast, Cheap (in Polish)
MEMS Sensors for HVAC&R: Small, Fast, Cheap (in Polish)
Yashar, D.; Domanski, P. A.
ASHRAE Journal, 69-74, May 2004.
Keywords:sensors; costs; viscosity; flow velocity; pressure drop
Abstract:Microelectronic mechanical systems (MEMS) have revolutionized the market for sensors by providing small, fast-responding measurement devices at low cost. They have been widely accepted in several common products. As an example, today’s automobile uses between 25 and 70 MEMS sensors to gather information where traditional macroscale sensors would be far too expensive to use.1 Increasing pressure for improved operating efficiency and reliability of HVAC&R equipment will promote the use of MEMS sensors in comprehensive fault detection and diagnostics (FDD) schemes. The combination of MEMS sensors, FDD, and networking capabilities has the potential to change the way refrigeration and air-conditioning systems are monitored and serviced.
Building and Fire Research Laboratory
National Institute of Standards and Technology
Gaithersburg, MD 20899
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Last updated: 11/30/2006